OPTICAL ELEMENT POSITIONING APPARATUS, PROJECTION

专利名称：OPTICAL ELEMENT POSITIONING

APPARATUS, PROJECTION OPTICAL SYSTEMAND EXPOSURE APPARATUS

发明人：Ryo Nawata,Makoto Mizuno,Shigeyuki

Uzawa

申请号：US12171644申请日：20080711

公开号：US20090021847A1公开日：20090122

专利附图：

摘要：The apparatus includes a holder holding an optical element, a back plate

supporting the optical element via the holder, a mechanism moving the optical elementin a six-degree-of-freedom, a base plate supporting the back plate via the mechanism,and six displacement sensors disposed on the base plate and measuring displacementamounts of different points on the optical element. The displacement sensors includesthree ones measuring them in a first direction, one measuring it in a second direction, andtwo ones measuring them in a third direction. The apparatus further includes atransformation processor transforming the six measured displacement amounts intodisplacement amounts of the optical element in the six-degree-of-freedom, a calibrationprocessor calibrating the transformed displacement amounts, and a controller

outputting command values to the displacing mechanism based on differences betweenthe calibrated displacement amounts and target displacement amounts of the opticalelement.

申请人：Ryo Nawata,Makoto Mizuno,Shigeyuki Uzawa

地址：Utsunomiya-shi JP,Utsunomiya-shi JP,Utsunomiya-shi JP

国籍：JP,JP,JP

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