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Systems and methods for controlling of electro-mig

2021-08-20 来源:意榕旅游网
专利内容由知识产权出版社提供

专利名称:Systems and methods for controlling of

electro-migration

发明人:Hayden Clavie Cranford, Jr.,Louis Lu-Chen

Hsu,James Stephen Mason,Chih-Chao Yang

申请号:US11942241申请日:20071119公开号:US07471101B2公开日:20081230

专利附图:

摘要:Systems and methods for controlling electro-migration, and reducing thedeleterious effects thereof, are disclosed. Embodiments provide for reversal of an

applied voltage to an integrated circuit when a measurement indicative of an extent ofelectro-migration indicates that a healing cycle of operation is warranted. During thehealing cycle, circuits of the integrated circuit function normally, but electro-migrationeffects are reversed. In one embodiment, micro-electro-mechanical switches are providedat a lowest level of metallization to switch the direction of current through the levels ofmetallization of the integrated circuit. In another embodiment, if the measurementindicative of the extent of electro-migration exceeds a reference level by a specifiableamount, then the voltage applied to the integrated circuit is reversed in polarity to causecurrent to switch directions to counter electro-migration. A plurality of switches areprovided to switch current directions through a lowest level of metallization so that thecircuits function normally even though the polarity of the applied voltage has beenreversed.

申请人:Hayden Clavie Cranford, Jr.,Louis Lu-Chen Hsu,James Stephen Mason,Chih-Chao Yang

地址:Cary NC US,Fishkill NY US,Eastleigh GB,Poughkeepsie NY US

国籍:US,US,GB,US

代理机构:Schubert Osterrieder & Nickelson PLLC

代理人:Joscelyn G. Cockburn

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